碲锌镉晶体生长炉自主设计与控温性能实验

Independent Design and Temperature Control Performance Experiment of the CdZnTe Crystal Growth Furnace

针对直径4英寸碲锌镉单晶材料生长的需求,在研究国外碲锌镉晶体材料生长取得的成果基础上,自主设计了一种基于移动炉体技术的碲锌镉晶体生长炉。炉体由4种规格的六段温控加热单元组成,采用工控机控制伺服电机来驱动滚珠丝杆直线导轨实现炉体升降,炉体内腔设置有刚玉陶瓷管及高温金属热管组成的加热炉管,通过高精度铂铑铂热电偶、欧陆、变压器及可控硅控制加热单元,基于模糊+PID控制算法和策略来控制加热炉温的温度分布。开展了加热温度稳定性和加热控温性能实验,结果表明:炉体内腔加热温度持续控温200 h,相同位置的温度波动±0.005℃,加热温度偏差≤±0.1℃;炉腔上、下部恒温区长度分别为400 mm和240 mm,中部温度梯度区长度约136 mm,加热温度1098℃附近的温度梯度为0.92℃·mm^(-1)。上述参数满足碲锌镉晶体生长炉的自主设计与控温性能要求。

In response to the demand for the growth of 4-inch diameter single-crystal Cd Zn Te materials and based on the results obtained from studying the growth of foreign Cd Zn Te crystal materials,a Cd Zn Te crystal growth furnace based on the mobile heating method was independently designed.The heating unit of the furnace body comprises four specifications with six temperature controlled sections,which are controlled by an industrial computer that controls the servo motor to drive the ball screw linear guide to achieve lifting.The inner cavity of the furnace was fitted with a heating tube comprising corundum ceramic tubes and high-temperature metal heat pipes using high-precision platinum-rhodium-platinum thermocouples,Eurofins,transformers,and thyristor control heating units.This furnace is based on a fuzzy+PID control algorithm with a strategy to adjust and control the temperature distribution of the heating furnace.This furnace was used to perform stability and control performance experiments during temperature heating.Experimental results showed that the heating temperature of the inner cavity of the furnace was continuously controlled for200 h,temperature fluctuation at the same position was±0.005℃,and heating temperature deviation was≤±0.1℃.The lengths of the upper and lower constant-temperature zones of the furnace cavity were 400 and240 mm,respectively.The length of the temperature gradient zone in the middle of the furnace cavity was approximately 136 mm.The length of the constant-temperature zone in the lower part of the furnace cavity was 240 mm.At a heating temperature of approximately 1098℃,the temperature gradient was 0.92℃·mm^(-1).Experimental results showed that this furnace meets the independent design and temperature control performance requirements for a Cd Zn Te crystal growth furnace.