等离子炬焰熔法单晶生长炉温度场分布的仿真模拟

Simulation of Temperature Field Distribution in Single Crystal Growth Furnace by Plasma Torch Melting

根据等离子炬焰熔法单晶生长结构特征,利用Fluent软件分析了等离子温度、燃气速度、外冷气速度、炉体结构对温度场的影响。结果表明,随着等离子体温度升高,轴向和纵向温度梯度增加,生长室温度整体升高;随着燃气速度的增加,生长界面处轴向和径向温度升高,但热源处径向温度下降;随着外冷气的增加,壁面温度降低;增加到一定数值后,作用减弱。当等离子炬反应器与生长炉的连接处改成带倒角的过渡形式时,生长界面处径向整体温度上升,且在热源温度为6000 K,燃气速度为0.2 m/s,外冷气速度为0.05 m/s的边界条件下,能生长直径约为10.54 mm的金红石单晶体。

According to the characteristics of single crystal growth structure by plasma torch melting method,the effects of plasma temperature,gas velocity,external cooling gas velocity and furnace structure on temperature field were analyzed by FLUENT software.The results show that the axial and longitudinal temperature gradients increase and the growth chamber temperature increases as a whole with the increasing plasma temperature,the axial and radial temperature at the growth interface increase with the increasing gas velocity,but the radial temperature at the heat source decreases,and the wall temperature decreases with the increasing external cooling gas,but the impact will be weakened when it reaches a certain value.Moreover,when changing the joint of plasma torch reactor and growth furnace into transition form with chamfering,the overall radial temperature of growth interface will increase,and the diameter of the grown rutile single crystal can reach about 10.54mm under the boundary conditions of 6000K heat source temperature,0.2m/s gas velocity and 0.05m/s external cooling gas velocity.