金刚石用陶瓷基金属复合结合剂发展及展望

Development and Prospect of ceramic-based metal composite bond for diamond

到目前为止,金属结合剂、陶瓷结合剂金刚石磨具在各自领域取得了可圈可点的成就。如晶圆背面减薄、晶圆划片等精密加工金刚石工具。金属/陶瓷复合结合剂金刚石砂轮作为新的超硬制品,既具有陶瓷结合剂锐性高、磨削效率高和易修正的特点,又拥有金属结合剂高强度、高硬度高韧性和寿命长的特点。因其可以广泛应用半导体、硬质合金以及复合材料而拥有广阔的前景。复合金属/陶瓷结合剂的开发需加强制备工艺的研究和产品配方的优化。此外新的制备工艺是该砂轮由研发转向实际应用的重要因素之一。

At present,metal bond and ceramic bond diamond grinding tools have made remarkable achievement in the application field,for example,the precision diamond tools utilized in the wafer back thinning,the waferslicing.As a novel super-hard product,diamond grinding wheel not only has the metal-ceramic composite bonds couple characteristics of high sharpness,high grinding efficiency and easy emendatory features,but also has the characteristics of high bending strength,high hardness and long usage life in metal bonds.Because it can be widely used in semiconductor,cemented carbide and composite materials,it has the extensive prospect.The development of composite metal/ceramic bond needs to strengthen the research of the preparation process and the optimization of the product formula.In addition,the new preparation process is one of the important factors for this grinding wheel to shift from research and development to practical application.