微型压电厚膜执行器的仿真与实验研究

Simulation and Experimental Research on Microscale Piezoelectric Thick Film Actuator

采用ANSYS有限元软件建立了微型压电厚膜执行器的多物理场耦合仿真模型,求解了微型压电厚膜执行器B(0,3)模态的共振频率为80673 Hz,在15 V交流电压下的振幅为210 nm。同时通过磁控溅射、电流体喷射打印工艺,制备了外径为4.5 mm的环形PZT压电厚膜执行器并对其进行性能表征,采用阻抗分析仪对压电执行器进行扫频测试,得出压电执行器的谐振频率为79 kHz,与模态仿真分析所得结果误差为2.1%;采用单点式激光多普勒测振仪,对压电执行器进行动态振幅测试,得出压电执行器定子齿部分表面质点的Z方向振幅为202.4 nm,与瞬态仿真分析结果相比误差为3.6%,实验结果验证了仿真的准确性。

ANSYS finite element software was used to establish the multi physical field coupling simulation model of micro piezoelectric thick film actuator.The resonance frequency of B(0,3)mode of micro piezoelectric thick film actuator was 80673 Hz,and the amplitude was 210 nm under 15 V AC voltage.At the same time,PZT thick film actuator with outer diameter of 4.5 mm was fabricated by magnetron sputtering and electrojet printingand its performance was characterized.An impedance analyzer was used to perform a frequency sweep test on the piezoelectric actuator,and it was found that the resonance frequency of the piezoelectric actuator was 79 kHz,and the error with the result obtained from the modal simulation analysis was 2.1%.A single-point laser Doppler vibrometer was used to test the dynamic amplitude of the piezoelectric actuator,and it was found that the Z-direction amplitude of the particles on the surface of the stator tooth part of the piezoelectric actuator was 202.4 nm,compared with the transient simulation analysis result,the error is 3.6%,which verified the accuracy of the simulation.