影响脉冲激光加工精度和效率因素的仿真分析

Simulation Analysis of the Factors Affecting the Precision and Efficiency of Pulse Laser Processing

为了探索纳秒脉冲激光在单个微观形貌内的路径规划问题,借助COMSOL Multiphysics有限元仿真分析软件,对脉冲激光加工微凹坑时的温度变化和烧蚀去除材料进行了模拟预估。建立了灰铸铁缸套经高能量激光照射后的温度场和变形场模型,在多物理场耦合作用下,探索单点凹坑精度和效率受激光作用时间、功率等因素的影响,建立预估数据模型,最终仿真试验结果显示:凹坑半径r^(2)∝ln(t),深度与时间呈线性关系,体积随时间呈二次分布。基于此仿真数据模型探索多点打击规划原则,寻找最优重叠率,并通过试验证实其可行性。

In order to study the path planning of nanosecond pulse laser in single microstructure,the temperature variation and ablation removal of micro-pits were simulated by using COMSOL Multiphysics finite element simulation software.The accuracy and efficiency of single-point pits are affected by the time and power of laser,and the prediction data model is established,the simulation results show that the pit radius r^(2)∝ln(t),the depth and time are linear,and the volume is quadratic distribution with time.Based on the simulation data model,the principle of multi-point strike planning is explored to find the optimal overlap ratio,and the feasibility is verified by experiments.