镜面反射式激光跟踪干涉测长的测量方法研究

Study on measurement method of mirror reflection laser tracking interferometric length measurement

为了解决镜面反射式激光跟踪干涉测长方法在不同尺寸长度标准溯源中缺乏有效的误差分析,测量效率低等问题,文中研究了平面镜调节分辨率、平面度引入的长度测量误差,并给出了针对不同长度的平面镜角度调节允许范围。建立了镜面反射式激光跟踪干涉测长模型,分析了该模型的测量不确定度来源,模拟仿真了平面镜角度调节的影响,并进行了坐标测量机长度测量比对实验和平面镜角度调节实验。实验表明:长度测量比对的E;验证结果小于1,证明了长度测量不确定度的准确性。通过针对不同长度的平面镜角度调节实验,得到了测量不确定度为3μm (长度1 m)和3.7μm (长度2.5 m)的测量结果;同时,测量效率提高了56%,验证了此方法的准确性、高效性。文中方法实现了长度的高精度测量与测量不确定度分析。

In the traceability of length standards of different sizes, in order to solve the problems of lack of effective error analysis and low measurement efficiency of mirror reflection laser tracking interferometric length measurement, the length measurement error caused by the plane mirror adjustment resolution and flatness was studied. The allowable range of plane mirror angle adjustment for different lengths was obtained. The model of mirror reflection laser tracking interferometry was established, and the source of measurement uncertainty of the model was analyzed. The influence of plane mirror angle adjustment was simulated. The length measurement comparison experiment of coordinate measuring machine and the plane mirror angle adjustment experiment were carried out. The experiment shows that the E;verification result of length measurement comparison is less than 1,which proves the accuracy of length measurement uncertainty. Through the plane mirror angle adjustment experiment for different lengths, the measurement results with measurement uncertainty of 3 μm(length 1 m) and3.7 μm(length 2.5 m) were obtained. The measurement efficiency was improved by 56%. Experiments verify the accuracy and efficiency of this method. This method realizes the high-precision measurement of length and the analysis of measurement uncertainty.