面向工程振动环境监测需求的MEMS加速度计及其应用

MEMS Accelerometer and Application Research in Environmental Monitoring about Engineering Vibration

随着我国重大建设项目的日益增多,核电设施、大型桥梁、大科学装置等重要建筑工程对其所处环境的振动控制要求愈发苛刻,对工程振动的监测需求也日益强烈。基于硅微加工和超精密制造的MEMS加速度计集成度更高、尺寸更小、功耗和成本更低,高度契合需要使用极多加速度计的振动环境监测的应用需求。文中介绍了压电式和电容式MEMS加速度计的测量原理、技术特征和发展历程,以及它们所构成无线传感网络在国内外重要建筑上的结构健康监测应用,并根据振动监测系统技术发展需求,展望了MEMS加速度计的发展方向。

With the increasing number of major construction projects in China,the vibration control requirements of nuclear power facilities,large bridges,large scientific devices and other important construction projects are becoming more and more stringent,and the demand for engineering vibration monitoring is also becoming increasingly strong.MEMS accelerometer based on silicon micromachining and ultra-precision manufacturing has higher integration,smaller size,lower power consumption and cost,which highly meets the application requirements of vibration environment monitoring that need to use a large number of accelerometers.This paper briefly introduced the measurement principle,technical characteristics and development history of piezoelectric and capacitive MEMS accelerometers,as well as the application of wireless sensor network in structural health monitoring of important architectures at home and abroad.And according to the vibration monitoring system technology development needs,the development direction of MEMS accelerometer was prospected.