三坐标测量机气浮导轨滑块结构设计与仿真

Structure Design and Simulation Analysis of Air Floating Slider Based on CMM

静压气浮导轨采用气体润滑,具有无摩擦、热变形小、寿命长等优点,且气膜的误差均化作用显著提高了其运动精度,满足三坐标测量机高精度、高平稳运动需求。为探究三坐标测量机中静压气浮导轨滑块的承载性能,建立了矩形气浮滑块结构模型,滑块内置小孔节流型气浮垫,运用COMSOL有限元仿真软件对其气浮静态承载特性进行仿真分析,验证了结构设计的合理性。

The hydrostatic air flotation guide rail adopts gas lubrication,which has the advantages of no friction,small thermal deformation and long service life.Moreover,the error averaging of the gas film significantly improves the motion accuracy,and meets the requirements of high precision and smooth motion of CMM.To explore the bearing performance of the static pressure air flotation guide rail slider in three coordinates measuring machine,rectangular air bearing slider structure model is established.The slide block is equipped with a small hole throttling air floating pad.COMSOL finite element simulation software is used to simulate and analyze the static bearing characteristics of air flotation,to verify the rationality of structure design.