氯化亚铜对多晶硅冷氢化技术中三氯氢硅收率的影响

Analysis of the Influence of Cuprous Chloride on the Yield of Trichlorosilane in Polycrystalline Silicon Cold Hydrogenation Technology

从行业发展的角度来看,进一步提升三氯氢硅收率成为有机硅企业重点研究的内容。随着相关技术的发展,三氯氢硅相关装置的压力、温度等相关数据逐渐趋于稳定状态,因此催化剂的选择成为重要影响因素。从冷氢化技术入手,最终选定氯化亚铜为催化剂,并采用实验分析的方法证实了氯化亚铜对三氯氢硅收率的影响。实验结果发现,在多晶硅冷氢化技术中,氯化亚铜的使用会提高三氯氢硅的收率,具有技术可行性。

From the perspective of industry development,how to further improve the yield of trichlorosilane has become the key research content of organic silicon companies.With the development of related technologies,the pressure,temperature and other related data of trichlorosilane-related devices are gradually becoming In a stable state,the choice of catalyst becomes an important factor.In this research,the article will start with cold hydrogenation technology.After understanding the research experience of related scholars,the final choice of cuprous chloride as the catalyst,and the use of experimental analysis methods to verify the effect of cuprous chloride on trichlorosilane The impact of yield.Finally,it can be found from the experimental results that in the cold hydrogenation technology of polysilicon,the use of cuprous chloride will increase the yield of trichlorosilane,which is technically feasible.