基于稀疏子孔径的大口径准直波前评价

Large-aperture collimated wavefront evaluation based on sparse subaperture

针对300 mm口径波长调谐干涉仪的准直波前,提出了基于稀疏子孔径的波前评价方法。该方法利用稀疏孔径的波前数据,构建均匀、等间隔的子孔径排布模型,运用同步拟合算法实现全口径准直波前的重构;通过数值计算分析子孔径间隔、子孔径大小对重构精度的变化规律,得到优化的子孔径排布方式;采用子孔径口径大小为10.8 mm、相邻子孔径中心间距为9.72 mm的优化子孔径排布对300 mm口径准直波前进行稀疏子孔径评价。仿真结果表明:优化后的稀疏子孔径评价波前残差峰谷值(peak valley,PV)为0.0016λ、残差均方根值(root meam square,RMS)为1.6893e−4λ。

A wavefront evaluation method based on sparse subaperture was proposed for the collimated wavefront of 300 mm aperture wavelength-tuned interferometer.The method used the wavefront data of sparse aperture to construct a uniform and equally spaced subaperture arrangement model and utilized the simultaneous fitting algorithm to realize the reconstruction of the full-aperture collimated wavefront.The change rules of subaperture spacing and subaperture size on the reconstruction accuracy were analyzed by the numerical calculation,and the optimized subaperture arrangement way was obtained.Finally,an optimized subaperture arrangement with a subaperture size of 10.8 mm and an adjacent subaperture center spacing of 9.72 mm was used for the sparse subaperture evaluation of 300 mm aperture collimated wavefront.The simulation results show that the optimized sparse subaperture evaluation wavefront residual peak valley(PV)value is 0.0016λ and the residual root mean square(RMS)value is 1.6893e−4λ.