基于不同磨料的氮化硅陶瓷球精研工艺研究

Study on finishing process of silicon nitride ceramic ball based on different abrasives

为探究磨料对氮化硅陶瓷球精研加工的影响,从而提高氮化硅陶瓷球的表面质量和材料去除率,以基液种类、磨料种类和研磨盘转速为主要影响因素设计正交试验,并分析各因素对表面粗糙度Ra的影响程度。以表面粗糙度Ra和材料去除率为评价指标,通过单因素试验优化研磨参数。根据正交试验结果,得到精研加工过程中各影响因素对于表面粗糙度Ra的影响程度,从大到小排列依次为:磨料种类>基液种类>研磨盘转速。综合考虑陶瓷球精研加工的要求,确定最佳的研磨参数组合为:煤油基液、碳化硅磨料以及150 r/min的研磨盘转速。在金刚石、碳化硅、氮化硼、氧化铬和氧化铁这5种磨料中,氧化铁磨料修复粗研过后的氮化硅陶瓷球表面缺陷的效果最好。

In order to explore the effect of abrasive on the finishing of silicon nitride ceramic ball,so as to improve the surface quality of silicon nitride ceramic ball and material removal rate,the orthogonal experiment was designed with the main influencing factors of base fluid type,abrasive type and grinding disc speed,the influence degree of various factors on the surface roughness Ra was analyzed.Taking the surface roughness Ra and material removal rate as evaluation parameters,the grinding parameters were optimized by single factor experiment.According to the results of orthogonal experiment,the influence degree of various factors on the surface roughness Ra in the finishing process was obtained,and the order from large to small is:abrasive type>base fluid type>grinding disc speed.Considering the requirements of ceramic ball finishing,the best combination of grinding parameters is determined as follows:kerosene based fluid,ilicon carbide abrasive and grinding disc speed of 150 r/min.Among the five kinds of abrasives:diamond,silicon carbide,boron nitride,chromium oxide and iron oxide,the iron oxide abrasive has the best effect in repairing the surface defects of silicon nitride ceramic ball after rough grinding.