氧化铟和氧化锡混合粉体喷雾造粒工艺研究

Process Research on Spray Granulation of Mixed Indium Oxide and Tin Oxide Powder

氧化铟锡(ITO)原料粉作为影响靶材制备的关键性因素,对所制备出的靶材质量有着重要影响,为了改善纳米氧化铟锡混合粉体的压制性能,提高ITO原料粉的质量,将纳米氧化铟和氧化锡混合粉体与分散剂和黏结剂混合之后球磨,再采用压力喷雾造粒技术制备近球形氧化铟锡造粒粉。分别研究浆料黏度、黏结剂含量、浆料固含量和进风温度对造粒氧化铟锡粉体微观表面形貌、松装密度、振实密度以及粒度分布的影响。结果表明:当黏结剂聚乙烯醇(PVA)质量分数为1%,氧化铟锡浆料固含量为50%,以及压力喷雾造粒机进风温度为200℃时,可以得到性能良好的氧化铟锡造粒粉。采用喷雾造粒工艺可以有效提高纳米氧化铟锡混合粉体的松装密度和振实密度,改善其压制性能,有利后续烧结获得高密度的ITO靶材。

Indium tin oxide(ITO)material powder,as a key factor affecting the preparation of target,played an important role in the quality of the prepared target.In order to improve the suppression performance of nano indium oxide and tin oxide mixed powder,to improve the quality of ITO raw material powder,in this experiment,nano-indium oxide and tin oxide powder were mixed with dispersant and binder,and then ball milled,and then pressure spray granulation technology was used to prepare near spherical indium oxide tin powder.The effects of slurry viscosity,binder content,slurry solid content and inlet air temperature on the surface morphology,bulk density,tap density and particle size distribution of indium tin oxide powders were studied.The results showed that when the mass fraction of binder polyvinyl alcohol(PVA)was 1%,the solid content of indium tin oxide slurry was 50%,and the inlet air temperature of pressure spray granulator was 200℃,the indium tin oxide granulating powder with good performance could be obtained.Spray granulation process can effectively improve the bulk density and tap density of nano indium oxide and tin oxide mixed powder,and improve its pressing performance,which would be favorable for subsequent sintering to obtain high density ITO target.