微电子工艺教学实验室建设的探索与实践

Exploration and practice of microelectronics process teaching laboratory construction

为适应微电子产业的高速发展,高校的微电子工艺教学实验室的建设和实验教学对专业人才的培养发挥着极其重要的作用。介绍了微电子工艺教学实验室建设的目标和设想,详细阐述了实验室的建设规划、建设内容和内涵建设。微电子工艺教学实验室的建设完善了中山大学电子与信息工程学院微电子专业的实验教学体系,为开设微加工实验课程提供了教学平台,将理论与实践紧密结合,有利于提高学生的实践能力和创新能力。

In order to adapt to the rapid development of microelectronics industry, the construction of microelectronics process teaching laboratory and experimental teaching play an extremely important role in the training of professionals. This paper introduced the objectives and ideas of the construction of microelectronics process teaching laboratory. And then, we described the construction plan, content and connotation construction of the laboratory. The construction of the laboratory has perfected the experimental teaching system of microelectronics specialty in our college. It provided a teaching platform for opening the microfabrication experiment course. Combining theory with practice, it helps to improve students’ practical and innovative abilities.