摘要
LTCC埋置电阻技术是实现T/R组件中隔离电阻、衰减器电阻及负载电阻内埋,促进T/R组件小型化更新换代的最佳手段之一。研究了T/R组件LTCC基板埋置电阻浆料与电阻阻值之间的关系,优化了埋置电阻的加工流程,并开发了一种埋置电阻激光修调的方法,最终实现了T/R组件LTCC基板埋置电阻的精确控制。结果表明,采用该方法后,埋置电阻合格率可提升30%,T/R组件LTCC基板的研制周期缩短了2周,降低了研制成本。
A large number of embedded resistors are needed in T/R module based on LTCC technology.The embedded resistor is difficult to be accuracy controlled for it is unable to be measured during processing and can't be adjusted after co-firing.Relationship between property of the paste and the resistance value,while the processing flow of embedded resistor is optimized and a method of laser trimming of the embedded resistor is exploited.A method to control the embedded resistance in LTCC substrate for T/R module is finally realized.The results show that qualified rate of embedded resistor is increased by 30%,and the processing period will be shortened by 2 weeks,and the cost of the T/R module product will be reduced.
作者
徐美娟
杨士成
李姗泽
刘旭
XU Meijuan;YANG Shicheng;LI Shanze;LIU Xu(China Academy of Space Technology(Xi’an),Xi’an 710000,China)
出处
《空间电子技术》
2021年第6期86-91,共6页
Space Electronic Technology
关键词
T/R组件
埋置电阻
激光修调
精度控制
T/R components
embedded resistors
laser trimming
precision control
