一种新型氨气纯化器的设计

Design of a New Ammonia Purifier

阐述9N超纯氨气的纯化器设计,应用于光电子领域及MOCVD设备,包括纯化器工艺设计、纯化器外观设计、纯化器仪控设计,采用两塔吸附方式,可实现现场及远端控制。

This paper describes the design of 9N ultra pure ammonia purifier, which is applied to the field of Optoelectronics and MOCVD equipment, including purifier process design, purifier appearance design and purifier instrument control design. It adopts two tower adsorption mode, which can realize on-site and remote control.