摘要
采用化学气相输运(CVT)法和微机械剥离技术制备了SnS_(2)薄膜,使用Au电极作为源、漏电极,n型重掺杂Si作为栅极,制备了基于SnS_(2)薄膜的背栅型场效应晶体管(FET),并研究了其电学特性和可见光探测特性。结果表明,制备的SnS_(2)薄膜具有良好的结晶度,SnS_(2)薄膜背栅型FET具备良好的栅压调控特性。器件对波长为405 nm的蓝紫光表现出明显的光响应,光响应度高达456.82 A·W^(-1),外量子效率为1.40×10^(5)%,比探测率为7.12×10^(12)Jones,并且具有较快的光响应速度,上升和下降响应时间分别为1 ms和0.5 ms。器件的光探测性能受栅压调控,当栅压为40 V时,器件的光响应度可达730 A·W^(-1)。
SnS_(2)thin films were prepared by using chemical vapor transportation(CVT)method and micromechanical exfoliation technique.With Au electrodes as the source electrode and the drain electrode,and an n-type heavily doped Si as the gate electrode,the back-gate field effect transistors(FETs)based on SnS_(2)thin films were fabricated.The electrical characteristics and visible-light detection characteristics of devices were investigated.The results show that the prepared SnS_(2)thin film has good crystallinity.Back-gate FETs based on the SnS_(2)thin film show good gate voltage modulation characteristics.The device shows an obvious photoresponse to blue-violet light with a wavelength of 405 nm.The photoresponsivity is up to 456.82 A·W;,the external quantum efficiency is 1.40×10^(5)%,and the specific detectivity is 7.12×10^(12)Jones.The devices have a fast photoresponse speed,and the rising and falling response time are 1 ms and 0.5 ms,respectively.The optical detection performances of the devices can be modulated by gate voltages.When the gate voltage is 40 V,the photoresponsivity of the device can reach 730 A·W^(-1).
作者
景永凯
范超
孟宪成
刘哲
王蒙军
郑宏兴
杨瑞霞
Jing Yongkai;Fan Chao;Meng Xiancheng;Liu Zhe;Wang Mengjun;Zheng Hongxing;Yang Ruixia(School of Electronic and Information Engineering,Hebei University of Technology,Tianjin 300401,China)
出处
《半导体技术》
CAS
北大核心
2022年第2期87-93,104,共8页
Semiconductor Technology
基金
国家自然科学基金资助项目(61804043)。