基于声表面波的电站锅炉受热面温度监测传感器研究

Research on Temperature Monitoring Sensor of Heating Surface of Power Station Boiler Based on Surface Acoustic Wave

为了直接测量电站锅炉高温受热面的温度,对声表面波温度传感器进行有限元模拟及制备,并进行高温实验研究。选择硅酸镓镧(LGS)作为高温压电基底材料,对Au、Pt、Cu三种电极及不同厚度进行模拟分析,最终选择100 nm厚的Au电极。实验结果表明该传感器谐振频率随温度呈下降趋势,温度灵敏度较好为5.89 kHz/℃,且高温时的测温稳定性较好。

In order to directly measure the temperature of the high-temperature heating surface of the power station boiler,the surface acoustic wave temperature sensor was simulated by finite element method and the sensor was prepared,and high-temperature experimental research was carried out.The lanthanum gallium silicate(LGS)was selected as the high-temperature piezoelectric substrate material,and the three electrodes of Au,Pt,Cu and the different thicknesses of the three electrodes were simulated and analyzed.Finally,the 100 nm thick Au electrode was selected.The experimental results show that the resonance frequency of the sensor decreases with temperature,the temperature sensitivity is 5.89 kHz/℃,and the temperature measurement stability at high temperatures is better.