微小型惯性仪表发展现状、趋势以及对行业的影响

Development and trend of micro inertial sensors and its impact on the industry

惯性仪表(包括陀螺和加速度计)是惯性技术的基础和核心,近年来,以高精度硅微机电陀螺、集成化微光纤陀螺、速率积分半球谐振陀螺、谐振式加速度计为代表的新型惯性仪表技术发展迅猛,相比传统惯性仪表,能够兼顾高精度和低SWa P+C(Size Weight and Power,plus Cost,体积、重量、功耗和成本)指标,正推动惯性技术产生新变革。重点结合上述四种微小型惯性仪表,论述其国外最新进展,展望发展趋势,预测其对行业的影响,旨在为国内相关技术研究提供参考。

Inertial sensors,including gyroscopes and accelerometers,are the basis and core of inertial technology.In recent years,the new inertial sensor technology,represented by high performance silicon MEMS gyroscope,integrated micro FOG,rate integrating HRG and resonant accelerometer has developed rapidly.Compared with the traditional inertial sensors,it can meet the requirements of high performance and low SWaP+C at the same time,and is promoting new changes in inertial technology.To provide reference for domestic related technology research,the four kinds of micro-miniature inertial instruments are focused on,the latest development abroad is discussed,the development trend is forecasted and the impact on the industry is predicted.