MEMS环形陀螺仪正交误差补偿系统设计

Design of quadrature error compensation system for MEMS ring gyroscope

以一种电容式全对称S形弹性梁硅基环形波动陀螺仪为对象,对其正交误差进行了相关的研究,以提升MEMS环形陀螺仪的精度。首先,介绍了环形陀螺仪结构,同时以此结构为基础分析了正交误差产生的原因及影响;然后,对环形陀螺仪检测通道的输出信号进行量化分析,并根据正交力校正法设计了环形陀螺仪的正交误差补偿系统;最后,对加入正交误差补偿后的环形陀螺仪进行了实验测试。结果显示,校正后的零偏、零偏稳定性分别为-2.62°/s、1.37°/h,与校正前相比,分别提升了3倍和10.6倍,验证了该正交误差补偿系统对陀螺仪正交误差的抑制效果,补偿后陀螺仪的零偏稳定性显著提升,陀螺输出更加稳定,为MEMS陀螺仪应用于未来军事及民用领域奠定了基础。

A capacitive fully symmetric S-shaped elastic beam silicon-based ring wave gyroscope is taken as the object to study the quadrature error,in order to improve the accuracy of MEMS ring gyroscope.Firstly,the ring gyroscope structure is introduced,and based on this structure,the causes and effects of quadrature error are analyzed.Then,the output signal of the detection channel of the ring gyroscope is analyzed quantitatively,and the quadrature error compensation system of the ring gyroscope is designed according to the quadrature force correction method.Finally,the ring gyroscope with quadrature error compensation is tested experimentally.The results show that the zero bias and zero bias stability after correction are-2.62°/s and 1.37°/h,respectively,which are 3 times and 10.6 times higher than before correction.The experiments show that the quadrature error compensation system can restrain the quadrature error of gyroscope,and the zero bias stability of gyroscope is significantly improved after compensation,and the output of gyroscope is more stable,which lays a foundation for the application of MEMS gyroscope in military and civil fields in the future.