真空试验设备真空温度参数合检测的自动化实现

Automatic Test of the Vacuum and Temperture Performance for Vacuum Equipment Based on Program

为实现真空试验设备真空和温度参数的自动化检测,本文通过研制真空试验设备计量系统,采用在真空试验设备内部布置高精度铂电阻温度计,同时在设备真空接口处布置高精度全量程真空计实现数据准确测量,上位机利用Labview编程实现自动采集真空、温度的测量数据,从而解决了真空试验设备的真空和温度参数的计量检测自动化实现的难题。

In this paper,in order to solve the problem of the automatic testing of vacuum and temperature parameters of the vacuum equipment,a high-precision platinum resistance thermometer is arranged inside the as-tested equipment,and a high-precision full range vacuum meter is arranged at the vacuum interface of the equipment to realize accurate data measurement.The computer automatically collects the measurement data of vacuum and temperature through Labview program,so as to realize the automation of joint detection of vacuum and temperature parameters of the vacuum equipment.