弛豫铁电单晶三轴加速度传感器

Relaxation Ferroelectric Single Crystal Three-Axis Acceleration Sensor

该文提出了一种适用于低频测试的弛豫铁电单晶三轴加速度传感器的结构形式,加速度传感器每个坐标轴由一个单晶弯曲梁敏感元件组成。通过有限元仿真分析了弯曲梁结构中的单晶层厚度、基梁金属层厚度及基梁材料等结构尺寸参数对谐振频率及加速度灵敏度的影响,找到最优结构尺寸,研制了弛豫铁电单晶三轴加速度传感器样品并进行测试。测试结果表明,弛豫铁电单晶三轴加速度传感器各个方向的一致性良好,加速度灵敏度达86.1 mV/(m·s^(-2)),可以工作在10~400 Hz的低频段。

In this paper,a structure of relaxation ferroelectric single crystal three-axis acceleration sensor suitable for low frequency measurement is proposed.Each coordinate axis of the acceleration sensor is composed of a single crystal bending beam sensitive element.Through the finite element simulation,the influences of the structure dimension parameters of the thickness of the single crystal layer,the thickness of the metal layer of the base beam,the material of the base beam etc.in the bending beam structure on the resonance frequency and acceleration sensitivity are analyzed,and the optimal structure size is obtained,and a relaxation ferroelectric single crystal three-axis acceleration sensor prototype is developed and tested.The test results show that the single crystal three-axis acceleration sensor has good consistency in all directions,and the sensitivity of the acceleration sensor is up to 86.1 mV/(m·s^(-2)),and can work in the low frequency band of 10~400 Hz.