真空电子太赫兹器件研究进展

The research progress of vacuum electron device in terahertz band

太赫兹波因其具有电子学与光子学的特性,所以在深空探测、无损检测、通信及安检等领域有巨大应用潜力。近些年,太赫兹技术的迅猛发展离不开太赫兹真空电子器件的不断进步。由于尺寸共度效应及电子束发射性能的限制,这类器件在迈向更高频段过程中遇到了不小的困难。针对这些问题,研究人员通过改良高频结构、控制加工精度、制备更优性能的材料、更精准的计算手段等一系列措施进行解决。本文介绍几种主流小型化太赫兹器件研究过程中的解决方案及最新进展,最后根据现阶段发展情况总结未来可能会遇到的问题及解决方法。

The terahertz wave has great potential in deep space exploration,nondestructive testing,communication and security inspection because of its characteristics of electronics and photonics.The rapid development of terahertz technology in recent years is inseparable from the continuous progress of terahertz vacuum electronic devices.Due to the size sharing effect and the limitation of electron beam emission performance,this type of device has encountered considerable difficulty in the process of higher frequency bands.To solve these problems,a series of measures have been taken,such as improving high-frequency structure,controlling machining accuracy,preparing materials with better performance and more accurate calculation methods.This paper introduces the solutions and the latest progress of several mainstream miniaturized terahertz devices,and finally summarizes the problems and solutions that may be encountered in the future according to the current development situation.