微米级粒度标准物质的研制

Development of reference materials with micron particle size

利用种子聚合法和种子生长法分别合成4种单分散聚苯乙烯微球和1种二氧化硅微球;利用密排阵列-光学显微镜法和扫描电子显微镜法对5种微球的粒径进行定值测量;光学显微镜和扫描电子显微镜的放大倍数分别利用溯源到He-Ne激光波长的测微尺和扫描电子显微镜校准光栅校准。结果表明:4种聚苯乙烯微球粒度标准物质的平均粒径分别为(15.37±0.07)、(28.95±0.12)、(66.49±0.15)、(116.4±0.3)μm,二氧化硅微球的粒径为(9.97±0.05)μm;样品均匀、稳定,定值结果可靠。

Four kinds of samples of monodisperse polystyrene(PS)microspheres and one kind of sample of monodisphere silica microspheres used for microsize standards were synthesized through seeded growth method.Particle sizes of the five kinds of microspheres were determined by using arraysizing-optical microscopy method and SEM method.The magnification of the optical microscopy and SEM were calibrated with the NIST stage micrometer of SRM2800 and a SEM pitch calibration standard,respectively.The certified values of these calibration standards were traced to He-Ne laser wavelength.The results show that the average particle sizes of the four kinds of PS microspheres are(15.37±0.07),(28.95±0.12),(66.49±0.15),(116.4±0.3)μm,respectively.The average size of silica microspheres is(9.97±0.05)μm.The samples are uniform and stable,and the detemination results are reliable.