激光直写制备金属与碳材料微纳结构与器件研究进展

Research progress of laser direct writing fabrication of metal and carbon micro/nano structures and devices

激光直写技术作为一种新兴的低成本、高效、高精度的加工技术,可以适用于几乎任意自由度的二维或者三维微纳结构快速成型制备。这对光电子以及半导体微纳结构与器件的制备具有重大的意义。金属微纳结构在电子学和光子学中有着广泛的应用。本文综述了激光直写制备金属微纳结构相关研究进展。主要包括激光直写制备金、银、铜以及复合材料微纳结构与器件。随后重点综述了激光直写表面增强拉曼光谱微流道芯片相关的研究进展。随着环保要求的不断提高,功能性碳材料将会在更多领域得到广泛的应用。与传统的热碳化方法相比,激光直写工艺可以在材料的表面上实现精细的图案化微纳结构的制备。本文进一步综述了激光碳化直写碳功能材料相关研究进展。主要包括激光直写原位还原氧化石墨烯、激光碳化木材、叶子等木质材料。通过对本课题组的研究以及目前相关的研究成果进行综述,本文可为激光直写制备金属与碳材料微纳结构与器件研究及应用提供参考。

As a low-cost,high-efficiency,and high-precision processing technology,laser direct writing can be applied to rapidly prototype two-dimensional or three-dimensional micro/nano-structures with almost arbitrary degrees of freedoms.This is of great significance to the fabrication of optoelectronics and semiconductor micro-nano structures and devices.Metal micro/nano-structures have a wide range of applications in electronics and photonics.This article reviews the research progress of laser direct writing of metal micro/nano-structures,including the preparation of micro/nano-structures and devices using gold,silver,copper and their composite materials.Subsequently,the research progress of laser direct writing on surface-enhanced Raman spectroscopy microfluidic chip is reviewed.With increase of requirements for environmental protection,functional carbon materials are extensively used in many fields.Compared with the traditional thermal carbonization method,the laser direct writing process can realize the fabrication of fine patterned micro/nano-structures on the surface.This article reviews the research progress of laser in-situ reduction of graphene oxide,laser carbonized wood,leaves and other wood materials.By reviewing the research of our research group and other related research results,this article can provide reference for the research and application of laser direct writing of metal and carbon material for micro/nano-structures and devices.