FIB-SEM双束系统在红外焦平面探测器研制中的应用

Applications of the FIB-SEM Dual Beam System in the Development of Infrared Focal Plane Detector

聚焦离子束扫描电子显微镜(Focused Ion Beam Scanning Electron Microscope,FIB-SEM)双束系统结合了扫描电子显微镜与聚焦离子束系统的优势。基于该系统的高分辨率、原位加工及观测的特点,研究了它在缺陷与像元解剖分析、透射电镜样品制备以及电路修复等方面的应用。详细介绍了用FIB-SEM系统定位问题像元的方法和修复电路的具体过程,并阐明了它对红外焦平面探测器研制的重要作用。该系统是高性能红外探测器研制过程中不可或缺的重要表征手段。

The focused ion beam scanning electron microscope system combines the advantages of scanning electron microscope and focused ion beam system.Based on the advantages of high resolution,in-situ processing and observation,its applications in defect anatomical analysis,pixel anatomical analysis,transmission electron microscope sample preparation and circuit repair are studied in this paper.The method of locating pixels with problems and the specific process of circuit repair are introduced in detail,and its important role in the development of infrared focal plane detectors is illustrated.The system is an indispensable characterization means in the development of high-performance infrared detectors.