摘要
High detectivity is essential for solar-blind deep-ultraviolet(DUV)light detection because the DUV signal is extremely weak in most applications.In this work,we report ultrahigh-detectivity AlGaN-based solar-blind heterojunction-field-effect phototransistors fabricated utilizing dual-float-photogating effect.The p^(+)-Al_(0.4)GaN layer and Al_(0.4)GaN absorber layer deposited on the Al_(0.6)GaN barrier serve as top pin-junction photogate,while the thin Al_(0.4)GaN channel layer with a strong polarization field inside acts as virtual back photogate.Due to the effective depletion of the two-dimensional electron gas at the A1_(0.6)Ga_(0.4)N/Al_(0.4)Ga_(0.6)N heterointerface by the top photogate,the dark current was suppressed below 2 pA in the bias range of 0 to 10 V.A high photo-to-dark current ratio over 10^(8) and an optical gain of 7.5×10^(4) were demonstrated at a bias of 5 V.Theoretical analysis indicates that the optical gain can be attributed to the joint action of the floating top and back photogates on the channel current.As a result,a record high flicker noise(Johnson and shot noise)limited specific detectivity of 2.84×10^(15)(2.91×10^(17))cm Hz^(0.5)W^(-1) was obtained.Furthermore,high response speed at the microsecond level was also shown in the devices.This work provides a promising and feasible approach for high-sensitivity DUV detection.
基金
National Key Research and Developtment Program of China(2016YFB0400901)
State Key Program of National Natural Science Foundation of China(61634002)
Key Realm RD Program of Guangdong Province(2019B010132004,2020B010172001)
Key Realm RD Program of Guangzhou(202103030002)。