摘要
Optical signaling without a high voltage driver for electric-optic modulation is in high demand to reduce power consumption,packaging complexity,and cost.In this work,we propose and experimentally demonstrate a silicon mode-loop Mach–Zehnder modulator(ML-MZM) with record-high modulation efficiency.We used a mode-loop structure to recycle light twice in the phase shifter.With an L-shaped PN junction,a comparably large overlap between the PN junction and optical modes of both TE0 and TE1 was achieved to lower the driving voltage or decrease the photonic device size.Proof-of-concept high-efficiency modulation with low VπL of 0.37 V · cm was obtained.Subvoltage Vπcan be realized with a millimeter’s length phase shifter by this scheme,which makes the realization of CMOS-compatible driverless modulation highly possible.40 Gb/s signaling with a bit error rate below the 7% forward-error-correction threshold was then demonstrated with the fabricated ML-MZM,indicating great potential for high-speed optical communication.
基金
National Key Research and Development Program of China (2018YFB1801004)
National Natural Science Foundation of China (61875049, 61875124,61935011)
The Major Key Project of PCL (PCL2021A14)。