基于热压印—半固化法制备V-cut结构柔性电阻式压力传感器

Preparation of V-Cut Structure Flexible Resistive Pressure Sensor Based on Hot Press Printing-Half Curing Method

现代传感器领域中,由于柔性传感器的稳定性较高,量程较广,且具有良好的变形能力等特点,逐渐成为研究的热点,结合柔性传感器应用中提升灵敏度和减小误差值的要求,采用差温热压印方法以及半固化封装工艺,以聚二甲基硅氧烷(PDMS)为基体,内部填充高电导率材料碳纤维(SCF)和碳纳米管(CNT)制备一种新型PDMS/SCF/CNT传感复合材料,并且将其组装成压阻式柔性传感器,设计了利于提升灵敏度的V槽形微结构。同时对比了不同SCF填料浓度对传感器性能的影响。实验表明,不同SCF含量的传感器在压力为0~350 N以内均具有良好的灵敏度,最大值为-3.36Ω/N,以PDMS/4%SCF/1%CNT为原料制备的传感器,重复性误差为7.8%。

The flexible sensor had become a research hot-spot in the field of modern sensors because of its high stability,wide range and good deformation ability.In order to improve the sensitivity and reduce the error value in the application of flexible sensor,differential thermal imprinting method and half curing packaging method was adopted,with polydimethylsiloxane(PDMS)as the matrix,filled with high conductivity materials carbon fiber(SCF)and carbon nanotube(CNT),a new PDMS/SCF/CNT composite material was prepared and assembled into a piezoresistive flexible sensor,a V-groove microstructure was designed to improve the sensitivity.At the same time,the effects of different SCF filler concentrations on the performance of the sensor are compared.The experiment results showed that the sensor with different SCF content had good sensitivity within the pressure of 0~350 N,maximum sensitivity was-3.36Ω/N,the sensor was made from PDMS/4%SCF/1%CNT,the repeatability error was 7.8%.