摘要
基于有限元仿真研究了方环和圆环形谐振器的静态位移点,并分析了支撑轴位置对谐振器性能的影响,提出了优化设计方案:对于方环形谐振器,在对角处设置双端侧向支撑以降低其锚点损耗;对于圆环形谐振器,采用单端侧向支撑以及三端底部支撑相结合的器件结构,在保证电学信号引出的同时,提升器件的品质因数Q。针对所设计的器件结构特征,设计了一种基于七步光刻工艺的微纳制程,并成功实现器件的高成品率制备。测试结果表明:前者的Q值和机电耦合系数k_(eff)^(2)分别为1707.4和0.98%,后者的Q值和k_(eff)^(2)分别为1844.7和1.58%。相比于四端支撑环形谐振器,优化设计的支撑结构使得器件Q值得到大幅提升。此外,还分析研究了不同表面电极材料对环形谐振器的性能影响。
The static displacement points of the square-ring and circular-ring resonators are researched by finite element simulation,influence of support shaft position on performance of resonators is analyzed and optimal designing scheme are proposed.For the square-ring resonator,two-end lateral support are set at the opposite corners of the square ring to reduce anchor loss;for the circular-ring resonator,a combination of a single-end lateral support and three-end bottom supports is proposed to improve its quality factor Q while ensuring the extraction of electrical signals.Aiming at the structural characteristic of designed devices,a micro-/nano-fabrication process based on seven-step photolithography is designed,and the high-yield fabrication of the devices is successfully achieved.The measured results show that the Q value and electro-mechanical coupling coefficient k_(eff)^(2)of the former are 1707.4 and 0.98%,and the later are 1844.7 and 1.58%,respectively.Compared to the ring resonators with four-end support,the Q values of the device with optimized support structures is significantly promoted.In addition,the influence of different surface electrode materials on device performance is also analyzed.
作者
诸政
吕世涛
张敖宇
孙海燕
赵继聪
ZHU Zheng;Lü Shitao;ZHANG Aoyu;SUN Haiyan;ZHAO Jicong(School of Information Science and Technology,Nantong University,Nantong 226019,China)
出处
《传感器与微系统》
CSCD
北大核心
2022年第3期24-27,35,共5页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(61804084)。
关键词
微机电系统
压电谐振器
制备工艺
锚点损耗
品质因数
micro-electro-mechanical system(MEMS)
piezoelectric resonator
fabrication process
anchor loss
quality factor