砷烷的合成与纯化

Synthesis and Purification of Arsine

砷烷是重要的电子特气之一,是半导体工业中不可缺少的基础材料。由于其本身的剧毒性、合成纯度要求高,净化难度大等因素,在国内的安全大背景下,很少有企业愿意冒风险开展此类工作。在此,列举了关于砷烷制备、提纯等一系列工艺的进展。

Arsine(AsH_(3))is one of the important electronic gases and an indispensable basic material in semiconductor industry.However,few enterprises are willing to take risks to carry out such work under the background of domestic safety due to factors such as highly toxic,high purity requirements,difficult synthesis and purification.Here,a series of progresses in the preparation and purification of arsine are listed.