摘要
为了获得数字微镜器件(DMD)的真实光学特性,提出了微镜单元杂散光分布测试方法,并搭建实验装置对2×2阵列区域微镜单元的杂散光分布情况进行测试。提出了一种杂散光测试方法,并针对微镜单元尺寸小、配置方式灵活的特点,设计了汇聚光斑大小连续可调的照明系统以及可以对微镜单元清晰成像的成像系统。通过实验得到了2×2阵列区域微镜单元的杂散光分布情况。测试结果表明,单个微镜单元中心孔道位置附近反射的能量较强,靠近边缘位置反射的能量则相对较弱。此外,测试区域之外的微镜单元也会反射一部分能量,测试区域内微镜单元杂散光绝对强度最大值出现在中心孔道附近,其灰度值为6.86,紧邻测试区域微镜单元杂散光绝对强度最大值同样也出现在中心孔道附近,其灰度值为4.01,由此可以说明中心孔道位置附近的杂散光较强;测试区域内微镜单元的杂散光相对强度相对较弱,从测试区域边缘开始急剧增大,经过大约两个微镜单元后达到峰值,数值为293.5%,此后开始急剧下降。
In order to obtain the true optical characteristics of a Digital Micro-mirror Device(DMD),a test method for the stray light distribution of the micro-mirror unit was proposed and an experimental device was built to test the stray light distribution of a micro-mirror unit in the 2×2 array area.First,a stray light test method is proposed.Then,in view of the small size of the micro-mirror unit and the flexible configuration mode,an illumination system with a continuously adjustable convergent spot size and an imaging system that can clearly image the micro-mirror unit was designed.Finally,the stray light distribution of the micro-mirror unit in the 2×2 array area was obtained through experimentation.The test results show that the reflection en-ergy near the center channel of a single micro-mirror unit is strong,while the reflection energy near the edge is relatively weak.In addition,the micro-mirror unit also reflects part of the energy outside the test area.The maximum absolute stray light intensity of the micro-mirror unit in the test area appears near the central chan-nel,and its gray value is 6.86.The maximum absolute stray light intensity of the micro-mirror unit close to the test area also appears near the central channel,and its gray value is 4.01,which indicates that the stray light near the central channel is strong.The relative intensity of stray light in the test area is relatively weak,which increases sharply from the edge of the test area and reaches the value of 293.5%after about two micro-mirror units,and then decreases sharply.
作者
姚雪峰
高毅
龙兵
于晨阳
李文昊
于宏柱
张靖
李晓天
YAO Xue-feng;GAO Yi;LONG Bing;YU Chen-yang;LI Wen-hao;YU Hong-zhu;ZHANG Jing;LI Xiao-tian(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;Key Laboratory of Trace Testing and Identification Technology of the Ministry of Public Security,Criminal Investigation Police University of China,Shenyang 110035,China;Key Laboratory of Sichuan Higher Education Criminal Science and Technology Laboratory(Sichuan Police College),Luzhou 646000,China;China Electronics Technology Group Corporation(CETC10),Chengdu 610036,China;University of Chinese Academy of Sciences,Beijing 100049,China)
出处
《中国光学》
EI
CAS
CSCD
北大核心
2022年第2期339-347,共9页
Chinese Optics
基金
吉林省科技发展计划项目(No.20210203053SF,No.20190302047GX,No.20190201104JC,No.20200404197YY)
刑事检验四川高校重点实验室开放课题(No.2019ZD02)
国家自然科学基金项目(No.61975255,No.U2006209,No.61505204)
公安部科技强警基础工作专项项目(No.GABJC04)
辽宁省教育厅重大科研经费项目(No.ZGXJ2020002)
中国刑事警察学院科研基金项目(No.D2019036)。
关键词
数字微镜器件
微镜单元
杂散光分析
成像特性
精密测量
DMD
micro-mirror unit
stray light analysis
imaging properties
precision measurement