多结级联垂直腔面发射激光器失效分析

Failure Analysis of Multi-junction Cascade Vertical Cavity Surface Emitting Laser

对自主研发的940 nm大功率三结垂直腔面发射激光器(VCSEL)单点器件的高温高电流老化失效后的器件进行了失效分析研究。首先,通过热阻测试确定了加速老化实验的结温,并计算了老化加速因子为104。随后,对老化过程中产生的失效器件进行失效分析。通过老化前后器件L-I-V、正反向V-I、光学及红外外观、近场光斑及透射电子显微镜(TEM)研究了器件老化前后性能及发光模式变化,确定了器件的失效位置,分析了失效原因,并通过TEM图像确认了器件失效是由P-DBR中的位错生长导致。本文为国际首次对多结VCSEL器件失效分析的研究报道,对继续优化VCSEL内部结构设计及提升工艺控制能力、提高多结VCSEL器件寿命及可靠性具有一定指导意义。

In this paper,the failure analysis of the self-developed 940 nm high-power triple junction vertical cavity surface emitting laser(VCSEL)single-emitter device after high temperature and high current aging failure is carried out.First,through the thermal resistance test,the junction temperature of the accelerated aging experiment was determined,and the aging acceleration factor was calculated to be 104.Subsequently,failure analysis was performed on the failed devices produced during the aging process.Through the L-I-V,forward and reverse V-I,optical and infrared appearance of the device before and after aging,near-field spot and transmission electron microscope(TEM),the performance and light-emitting mode changes of the device before and after aging were studied,and the failure location of the failed device was determined and the cause of the failure was analyzed.The device was confirmed by TEM image.The failure is caused by the growth of dislocations in P-DBR.This article is the first report on the failure analysis of multi-junction VCSEL devices in the world.It has certain guiding significance for continuing to optimize the internal structure design of VCSEL and improving process control capabilities,and to improve the life and reliability of multi-junction VCSEL devices.