TiZrHf中熵合金表面MPCVD法制备金刚石-碳化物涂层及其摩擦磨损性能研究

Study on Friction and Wear Property of Diamond-carbide Coatings Synthesized on TiZrHf Mid-entropy Alloy by MPCVD Method

采用微波等离子化学气相沉积(MPCVD)法,以高纯甲烷和氢气为反应气体,在TiZrHf中熵合金表面碳化-沉积获得碳化物/金刚石涂层。利用扫描电镜、X射线衍射仪、显微硬度计、摩擦磨损等方法表征了不同甲烷浓度条件下涂层的组织结构、物相组成、硬度及耐磨性能。结果表明,碳化-沉积后涂层的主要成分为金属碳化物和纳米金刚石颗粒,表面硬度明显提升。其中,甲烷浓度为3%时,涂层的表面硬度最高(约660.2 HV),摩擦系数最低,且耐磨性得到极大改善。

Diamond-carbide coatings were synthesized on TiZrHf mid-entropy alloy by microwave plasma chemical vapor deposition(MPCVD)method with high-purity methane(CH_(4))and hydrogen(H_(2))as reaction gases.The structure,phase composition,hardness and wear property of the coatings were obtained under the condition of different CH_(4) concentration.The results show that the main components of the coatings after carbonization-deposition are metallic carbide and nanodiamond particles,and the surface hardness is enhanced obviously.Among them,the coatings prepared with 3%methane concentration possess the highest hardness(about 660.2 HV)and the lowest friction coefficient,and the wear-resisting property was modified significantly.