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导体厚度对LTCC电路微波性能的影响

Effect of conductor thickness on microwave properties of LTCC circuits
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摘要 贵金属导体占据低温共烧陶瓷(LTCC)成本的主要部分,降低贵金属导体用量是控制LTCC成本的重要途径之一。采用不同目数的丝网印刷获得了不同厚度的金属导体,研究了不同厚度导体对带状线的微波性能影响;制作了低膜层厚度的T/R组件,并测试了其的微波性能。研究结果表明,导体厚度控制在5μm以上对带状线的插入损耗和回波损耗影响较小,对T/R组件输出功率和接收增益等关键指标影响也不大。通过控制导体厚度可以有效降低LTCC成本,并且不影响LTCC电路的微波性能。 Precious metal conductor is the main part of low temperature co-fired ceramic(LTCC)cost,so reducing the amount of precious metal conductor is one of the important ways to control the cost of LTCC.Metal conductors of different thickness were obtained by screen printing with different mesh count.The influence of different conductor thickness on the microwave properties of stripline was studied.The T/R module with low thickness was prepared and its microwave properties was tested.The results showed that the conductor thickness control above 5μm has little effect on the insertion loss and return loss of the stripline,and has little effect on the key indicators such as the output power and receiving gain of the T/R module.Controlling the thickness of conductor film can effectively reduce the cost of LTCC without affecting the microwave properties of LTCC circuit.
作者 侯清健 张兆华 胡永芳 崔凯 谢廉忠 HOU Qing-jian;ZHANG Zhao-hua;HU Yong-fang;CUI Kai;XIE Lian-zhong(Nanjing Research Institute of Electronics Technology,Nanjing 210039,China)
出处 《贵金属》 CAS 北大核心 2021年第4期27-31,共5页 Precious Metals
关键词 低温共烧陶瓷 微波电路 带状线 导体厚度 T/R组件 LTCC microwave circuit stripline conductor thickness T/R module
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