基于图像处理的透射电镜电子衍射标定与分析

Calibration and Analysis of Transmission Electron Microscope Electron Diffraction Based on Image Processing

基于LabVIEW软件的图像处理功能,依据相关国家标准对现有图像处理与分析软件功能拓展,建立人机交互标准化电子衍射标定与分析系统。首先通过透射电镜实验拍摄得到了金多晶电子衍射花样和不同晶带轴的硅单晶电子衍射花样,然后借助LabVIEW软件的图像处理功能,分别对电子衍射花样经图像预处理、阈值分割、形态学处理、图像特征提取与量化计算,将图像处理的结果输出与相关标准衍射指数进行参数匹配,并进行误差分析。结果表明,衍射指数的测量值均比标准值略低,且测量误差均在5%以内,此研究标准化了测试分析流程,提高了选区电子衍射的分析效率。

Based on the image processing function of LabVIEW software,this article expands the existing image processing and analysis software functions according to relevant national standard,and establishes a human-computer interaction standardized electron diffraction calibration and analysis system.First,the gold polycrystalline electron diffraction pattern and the silicon single crystal electron diffraction pattern with different crystal zone axis are obtained through transmission electron microscopy experiments.Then,the electron diffraction pattern is subjected to image preprocessing with the image processing function of LabVIEW software,threshold segmentation,morphology,and image feature extraction and quantitative calculation.The output of the image processing result is matched with the relevant diffraction index of national standard,and the error analysis is performed.The results of the automatic calibration and analysis of the electron diffraction pattern with the image processing show that the measured values of the diffraction index are slightly lower than the standard values,and the measurement errors are all within 5%.This research standardizes the test analysis process and improves the analysis efficiency of the selected area electron diffraction.