静电喷印技术在太赫兹超表面制备中的应用

Application of electrostatic jet-print technology in terahertz metasurface devices fabrication

近年来,太赫兹技术快速发展,基于超表面的太赫兹器件受到广泛关注,并已应用于太赫兹成像、光谱和生物传感等诸多领域。但太赫兹超表面器件的制备复杂且成本高,而静电喷印技术无需掩模版,成本低、精度高且易于在异形曲面上制作。基于静电喷印技术设计和制备了太赫兹吸波器,并利用太赫兹时域光谱系统(THz-TDS)对样品进行了性能测试,实验与仿真结果基本相符,在0.098~0.353 THz频段内吸收大于90%。此外,还设计了太赫兹线极化转换器,在0.167~0.355 THz频段内的极化转换大于95%,相对带宽约72%,并分析了所设计样品的制备工艺条件,验证了静电喷印技术对于制备太赫兹极化转换器的可行性。研究成果表明,静电喷印技术在太赫兹超表面器件的制备中具有广泛的应用前景。

In recent years,terahertz technology has been developed rapidly,and terahertz devices based on metasurfaces have received widespread attention and have been applicated in many areas,including terahertz imaging,spectroscopy,biosensing,and so on.However,the fabrication of the terahertz metasurface devices is complex and costly,while electrostatic jet-print technology has the advantages of mask-free,low cost,high precision,and special-shaped curved surface conformability.In this work,a terahertz absorber based on the electrostatic jet-print technology was designed and fabricated,and characterized by using a reflective terahertz time-domain spectrometer(THz-TDS).The result shows an absorption rate greater than 90%in the range of 0.098-0.353 THz,which is basically consistent with the simulation result.In addition,a terahertz polarization converter was also designed.The conversion efficiency in the range of 0.167-0.355 THz is greater than 95%,while the relative bandwidth is about 72%.The fabrication process conditions of the designed terahertz polarization converter was then analyzed,and the electrostatic jet-print technology was verified to be a promising fabrication method.The research results show that the electrostatic jet-print technology has broad application prospects in the fabrication of terahertz metasurface devices.