热电型太赫兹探测器响应度校准技术

Responsivity Calibration Technology for Pyroelectric Terahertz Detector

为保证太赫兹辐射强度测量的准确可靠,对热电型太赫兹探测器的响应度进行了校准。首先,基于替代法构建了太赫兹探测器响应度校准装置,该装置的合成标准不确定度为2.4%。然后,在1.63 THz频率点处,利用校准装置对12D-3S-VP型太赫兹探测器进行了校准,得到的响应度校准结果为197.6 mV/W,与厂家标称值一致。对自主研制的热电型太赫兹探测器进行了校准,得到的响应度和合成标准测量不确定度分别为362.2 mV/W和2.7%。最后,将校准结果的标准偏差值与合成标准不确定度进行了比较,发现标准偏差值在合理范围内,这进一步证明了校准方法、校准结果以及不确定度分析的合理性。

In order to ensure the accuracy and reliability of terahertz radiation intensity measurement,the responsivity calibration of pyroelectric terahertz detectors is carried out.First,a terahertz detector responsivity calibration device is constructed based on the substitution method,and the combined standard uncertainty of the device is 2.4%.Then,the 12 D-3 S-VP type terahertz detector is calibrated by the calibration device at the frequency point of 1.63 THz,and the responsivity calibration result is 197.6 mV/W,which is consistent with the value given by the manufacturer.The self-developed pyroelectric terahertz detector is calibrated,and the responsivity and the combined standard measurement uncertainty are 362.2 mV/W and 2.7%respectively.Finally,the standard deviation of the calibration result is compared with the combined standard uncertainty,and it is found that the standard deviation is in a reasonable range,which further proves the rationality of the calibration method,calibration results and uncertainty analysis.