先进微纳加工与测试平台超净化实验室环境系统设计综述

Overview of Environmental System Design for Westlake Center for Micro/Nano Fabrication(WCMNF)of Ultra-Clean Laboratory

西湖大学先进微纳加工与测试平台(以下简称“微纳平台”)依托工学院筹建,是西湖大学六个校级科研平台之一,秉承“顶尖、科学、经济”的理念,旨在打造由顶尖实验设备和优秀技术人才组建而成的先进微纳器件加工和微纳结构表征的大型仪器共享服务平台。简述了微纳平台超净化实验室系统工艺设计原则、理念、内容和方案,为后期西湖大学云谷校区的平台建设以及其他高校科研院所的微纳平台建设提供了相关参照。

The Westlake Center for Micro/Nano Fabrication(WCMNF)is a shared research and development facility at Westlake University.WCMNF provides cutting-edge facilities,equipment and expertised technical service to Westlake University students,staff,faculty as well as external academic and industrial clients.In this paper,the process design principle,concept,content and scheme of the micro-nano Platform super-purification laboratory system are briefly described,it provides a reference for the platform construction of Yungu campus of Westlake University and the Micro/Nano platform construction of other scientific research institutes.