非接触式静电电压测量仪校准方法研究

Research on Calibration Method of Non-contact Electrostatic Voltage Measuring Instrument

根据非接触式静电电压测量仪的工作原理,建立了一套非接触式静电电压测量仪校准系统。重点介绍了校准系统的组成和工作过程,以及决定校准系统测量准确度关键因素的标准平板电极的设计原则,并通过实验数据分析了标准平板电极的直径和边缘效应对测量结果的影响。最后以常用的非接触式静电电压测量仪EST101为例,根据校准装置测量不确定度主要来源,对校准结果进行不确定度分析,验证了此套校准系统满足校准要求。

According to the working principle of the non-contact electrostatic voltage measuring instrument,a calibration system of the non-contact electrostatic voltage measuring instrument is established.The composition and working process of the calibration system,as well as the design principles of the standard plate electrode,which are the key factors for the measurement accuracy of the calibration system,are mainly introduced.Finally,taking the commonly used non-contact electrostatic voltage measuring instrument EST101 as an example,according to the main source of measurement uncertainty of the calibration device,the uncertainty analysis of the calibration results is carried out,and it is verified that the calibration system meets the calibration requirements.