辐射制冷高反射Ag薄膜的腐蚀条件及防护

Corrosion Condition and Protection of High Reflective Ag Coating for Radiation Cooling Film

高反射Ag薄膜在空气中易老化,通过改变环境中的湿度、温度、反应气体浓度三个条件对Ag薄膜的腐蚀行为进行研究。结果显示:Ag薄膜试样在60℃,90%RH大气环境中12 d后的黄边占比为7.2%,湿度对Ag薄膜腐蚀的影响最显著,温度次之。反应气体浓度降低到水中溶解度时对Ag薄膜的腐蚀抑制效果明显。SiNx/Ag-Cu/SiNx膜系结构可以减少水汽吸附,延缓反应气体在薄膜中的扩散并阻隔水汽,实现对Ag薄膜的防护。在60℃,90%RH大气环境中12 d后,SiNx/Ag-Cu/SiNx反射膜未观察到腐蚀。

The highly reflective Ag film is easy to age in air.The corrosion behavior of the Ag film was studied by changing the three conditions of humidity,temperature and reaction gas concentration in the environment.The results showed that the yellow edge ratio of the Ag film sample was 7.2%after 12 d in the atmosphere of 60℃and 90%RH.Humidity had the most significant effect on the corrosion of Ag film,by followed temperature.When the concentration of reaction gas was reduced to the solubility in water,the corrosion inhibition effect on the Ag film was obvious.The SiNx/Ag-Cu/SiNx film structure could reduce water vapor adsorption,delay the diffusion of reactive gases in the film and block water vapor,so as to protect the Ag film.No corrosion was observed on the surface of SiNx/Ag-Cu/SiNx reflective film after 12 d in 60℃,90%RH atmosphere.