白光干涉测量法在波纹度指标检测中的应用

Application of white light interferometry in waviness index detection

探讨了白光干涉法测量波纹度指标的过程,介绍了波纹度的标准及影响波纹度测量结果的主要因素,阐述了白光干涉三维轮廓仪测量波纹度指标的具体方法。白光干涉测量法是一种非接触式测量方法,拓宽了分析方法。结果表明,该方法不仅可以得到材料表面的波纹度,而且可以得到具体的三维轮廓图像。

The measurement of waviness index by white light interferometry was discussed. The standard of waviness and the main factors affecting the measurement results of waviness were introduced. The specific method of measuring waviness index by white light interference 3 D profiler was expounded. White light interferometry was a non-contact measurement, which broadened the analysis method. The results show that the method could not only obtain the waviness of the material surface, but also obtain the specific three-dimensional contour image.