基于喷墨打印技术的织物基湿度传感器研究

Research on fabric-based humidity sensor based on inkjet printing technology

用聚(4-乙烯吡啶)(P4VP)与光刻胶SU-8混合液浸涂织物,在120℃的烘箱中处理20min进行交联反应,制得织物基底,采用喷墨打印技术将0.5g/mL的AgNO_(3)溶液在织物表面打印出线宽0.5mm、间隙宽度0.5mm的叉指电极图案,Ag;作为活化剂启动化学镀铜,在织物表面沉积形成铜层电极,将0.06g/mL PVA和0.03g/mL KOH混合制得PVA/KOH湿敏聚合物,并涂布在铜叉指电极上形成PVA/KOH湿敏聚合物薄膜,在100℃温度下干燥20min得到湿度传感器。利用扫描电镜对叉指电极的镀铜形貌进行表征,用四探针测试仪测量铜镀层的方阻仅为176mΩ/,用柔性测试系统对样品的耐弯性、附着稳定性进行研究,利用计时安培法测试了湿度传感器的电化学性能。结果表明:P4VP/SU-8改性、AgNO_(3)催化镀铜可以提高织物基镀铜层的导电性和附着力,从而使涂布PVA/KOH湿敏层聚合物制得的湿度传感器具有耐弯性、稳定性和高灵敏性。

The cross-finger electrode pattern made of AgNO_(3) printed on the surface of the fabric was coated with the mixture of P4 VP and SU-8 photoresist,processed in the oven at 120℃for 20 minutes for crosslinking reaction,and the fabric substrate was prepared.Ink-jet printing technology was used to print the cross-finger electrode pattern with line width of 0.5 mm and gap width of 0.5 mm on the fabric surface with 0.5 g/mL AgNO_(3) solution.Ag;was used as an activator to initiate electroless copper plating.A copper layer electrode was deposited on the surface of the fabric.PVA/KOH moisture-sensitive polymer was prepared by mixing 0.06 g/mL PVA and 0.03 g/mL KOH,and PVA/KOH moisture-sensitive polymer film was formed by coating on copper cross finger electrode.The humidity sensor was obtained by drying at 100℃for 20 minutes.Scanning electron microscopy(SEM)was used to describe the morphology of copper plating on the cross-finger electrode.The square resistance of the copper coating was only 176 mΩ/□measured by a four-probe tester.The flexure resistance and adhesion stability of the sample were studied by a flexible test system.The results shown that the P4 VP/SU-8 modification and AgNO_(3) catalytic copper plating can improve the electrical conductivity and adhesion of the copper plating layer on the fabric,so that the humidity sensor prepared by coating PVA/KOH moisture sensitive layer polymer had the characteristics of bending resistance,stability,and high sensitivity.