摘要
针对压电快速倾斜镜(PFSM)堆叠式压电陶瓷(PZT)(Pb(Zr,Ti)O_(3))驱动器伸长和弯曲变形的应力集中问题,依据Timoshenko模型,分析了堆叠式PZT驱动器的伸长弯曲变形模型。基于压电耦合理论分析了堆叠式PZT驱动器动态应力与驱动电压幅值、驱动电压频率和PZT驱动器顶部柔性铰链抗弯刚度的关系。采用响应曲面法获得了300 mm口径PFSM的优化设计和工作参数。研究方法和分析结果可以为优化PFSM关键元件参数,降低堆叠式PZT驱动器应力集中,提高PFSM的耐久性和可靠性提供参考和借鉴。
In order to solve the stress concentration problem of the extension and bending deformation of the stacked PZT(Pb(Zr,Ti)O_(3))actuator used in piezoelectric fast steering mirror(PFSM),the extension and bending deformation model of the stacked PZT actuator was analyzed firstly based on Timoshenko model.Then,the relationships between the dynamic stress of stacked PZT actuator and the driving voltage amplitude,the driving voltage frequency and bending stiffness of flexible hinge on top of PZT actuator were analyzed by the method of piezoelectric coupling theory.Finally,the optimal design parameters of 300 mm diameter PFSM were obtained by response surface method.The research method and analysis results of this paper could provide reference for optimizing the parameters of key components of PFSM,reducing the stress concentration of stacked PZT actuator,and improving the durability and reliability of PFSM.
作者
冉兵
赵帝植
文良华
Ran Bing;Zhao Dizhi;Wen Lianghua(Faculty of Intelligence Manufacturing,Yibin University,Yibin,Sichuan 644000,China;National Key Laboratory of Science and Technology on Blind Signal Processing,Chengdu,Sichuan 610000,China)
出处
《激光与光电子学进展》
CSCD
北大核心
2022年第5期262-271,共10页
Laser & Optoelectronics Progress
基金
国家自然科学基金面上项目(61975171)
四川省计算物理高校重点实验室开放课题(JSWL2018KFZ02)。
关键词
压电倾斜镜
堆叠式PZT驱动器
应力集中
压电耦合
响应曲面
piezoelectric fast steering mirror
stacked PZT actuator
stress concentration
piezoelectric coupling
response surface
