硬脆性材料用柔性磨具研磨的加工表面粗糙度建模

Surface Roughness Modeling for Lapping Hard and Brittle Materials by Flexible Abrasive Tools

通过分析磨粒与工件表面的作用过程,建立了硬脆性材料柔性磨具加工表面粗糙度的理论预测模型。以橡胶结合剂金刚石研磨盘为柔性磨具、蓝宝石衬底为工件,在不同弹性模量、磨粒浓度、磨粒粒度和研磨压力下开展研磨试验,将不同研磨条件下的表面粗糙度试验值与理论预测值进行比较,发现试验结果与理论模型预测结果的趋势一致,且预测误差为7.71%~10.1%,验证了所建立理论模型的可靠性。

By analyzing the interaction processes between abrasive particles and the surface of the workpiece,a theoretical prediction model for surface roughness of the hard and brittle materials by flexible abrasive tool was established herein.The rubber bond diamond lapping disc was selected as the flexible abrasive tool,and the sapphire substrate was selected as the workpiece.The lapping experiments were carried out under different elastic modulus,abrasive particle concentration,abrasive particle size,and different lapping pressures.And then,the experimental values of the surface roughness were compared with the theoretical predicted values under different lapping conditions,which shows that the experimental values are consistent with the predicted results of the theoretical model.The prediction errors are as 6.32%~11.76%,which proves that the established theoretical prediction model of surface roughness is reliable for lapping hard and brittle materials by flexible abrasive tools.