摘要
In this study we present a novel and flexibly applicable method to measure absolute and relative vibrations accurately in a field of 148 mm×110 mm at multiple positions simultaneously.The method is based on imaging in combination with holographic image replication of single light sources onto an image sensor,and requires no calibration for small amplitudes.We experimentally show that oscillation amplitudes of 100 nm and oscillation frequencies up to 1000 Hz can be detected clearly using standard image sensors.The presented experiments include oscillations of variable amplitude and a chirp signal generated with an inertial shaker.All experiments were verified using state-of-the-art vibrometers.In contrast to conventional vibration measurement approaches,the proposed method offers the possibility of measuring relative movements between several light sources simultaneously.We show that classical band-pass filtering can be omitted,and the relative oscillations between several object points can be monitored.
基金
We gratefully thank the German Research Foundation(DFG-Deutsche Forschungsgemeinschaft)for funding the projects“Dynamische Referenzierung von Koordinatenmess-und Bearbeitungsmaschinen”(OS 111/42-2 and SA 847/16-2).