摘要
This paper proposes an air-coupled piezoelectric micromachined ultrasonic transducer(PMUT)for detection and imaging of surface stains.A 508 kHz PMUT array is designed,fabricated,and characterized in terms of its electrical and acoustic properties,and it is used in a pulse echo validation test.Imaging of stains on metal blocks is successfully demonstrated.Compared with existing optical methods for stain detection,the proposed approach can work in a dark environment without color requirements.This work provides a new and promising route for the development of miniaturized stain detection systems.
基金
This work is supported by funding from the Natural Science Foundation of China(NSFC Grant No.62001322)
the Tianjin Municipal Science and Technology Project(No.20JCQNJC011200)
the National Key Research and Development Program(No.2020YFB2008801)
the Nanchang Institute for Microtechnology of Tianjin University。