宽温区高精度压力传感器补偿方法研究

Research on Compensation Method of High Precision Pressure Sensor in Wide Temperature Range

为满足航空航天、船舶等领域对高精度压力传感器的需求,针对硅压阻压力传感器温度漂移大的问题,该文提出一种采集电路和补偿方法。根据压敏芯体在不同温度下的压力输出特性,采用最小二乘多项式拟合与三次样条插值相结合的方法,对传感器芯体的温度灵敏度和非线性进行补偿,使传感器在较宽的-30~90℃温度区间内,输出精度达到±0.04%FS。该电路和算法可规范化,工程应用操作简便。

In order to meet the demand for high-precision pressure sensors in aerospace,shipbuilding and other fields,in view of the large temperature drift of silicon piezoresistive pressure sensors,an acquisition circuit and compensation method are proposed. According to the pressure output characteristics of the pressure-sensitive core at different temperatures,the method of combining least squares polynomial fitting and cubic spline interpolation is used to compensate the temperature sensitivity and nonlinearity of the sensor core,so that the sensor can operate in a wider temperature range within-30~90 ℃,the output accuracy reaches ±0.04%FS. The circuit and algorithm can be standardized,and the engineering application is easy to operate.