高温纯化设备真空气路优化解析

Analysis of Gas Path Optimization of High Temperature Purification Equipment

通过对现有国产高温纯化设备气场气路进行分析,对发现的问题进行优化处理,并根据新方案设计制造气场分气盘和气路,使国产高温纯化设备达到国外先进设备的纯化指标,满足我国三代半导体对于高纯度材料的要求。

By analyzing the gas field circuit of the existing domestic high-temperature purification equipment,optimized the problems, and the new gas field distribution plate and gas circuit were designed and manufactured according to the new scheme, so that the domestic high-temperature purification equipment reached the purification index of foreign advanced equipment and met the requirements of the third generation semiconductors for high-purity materials in China.