浅析用于多晶硅沉积的硅芯

A Type of Deposition Carrier for Polysilicon Reduction Process

从表面反应的相界面积着手分析了硅芯直径对质量沉积速度的影响。通过加大硅芯的直径来提高多晶硅反应面积,可以显著提高多晶硅的质量沉积速度。同时通过分析硅芯直径对沉积时间、单根硅棒的沉积质量、年运行批次以及60对棒还原炉单炉年产量,认为在Ri=1.5kg·m^(-2)h^(-1),最终硅棒直径为φ150mm时,采用φ100mm的硅芯可以获得最大的单炉年产量,同时还原电耗可以降低6.64kWh/kg·Si左右。目前普遍使用的细实心硅芯存在影响多晶硅产量和能耗方面的不足之处,而其他横截面型式如矩形硅芯、菱形(三角形)硅芯、管状硅芯以及组合硅芯等,除能提高多晶硅产量和降低还原能耗外,在硅芯原料成本和制备方法上,都具有优势和竞争力。同时建议将EFG方法用于制备硅芯作为技术储备并开展研究。

Under the same furnace type and process conditions,through the analysis of the silicon core diameter and the deposition time,the deposition quality of a single silicon rod,the annual operation and the single furnace year of 60 pairs of rod reduction furnaces,through the analysis of the diameter of the silicon core and the deposition time.Output,consider that when Ri=1.5 kg·m^(-2)h^(-1) and the final silicon rod diameter isφ150 mm,the use ofφ100 mm silicon core can obtain the largest single furnace annual output,and the reduction power consumption can be reduced by about 6.64 kWh/kg.Si.The generally used fine solid silicon cores have shortcomings that affect the volume and volume,while other cross-sectional types such as rectangular silicon cores,rhombic(triangle)silicon cores,quartz silicon cores and combined silicon cores can increase the volume and reduce the reduction constant.In addition,the silicon core raw material cost and preparation method are relatively advantageous and competitive.At the same time,it is suggested that the EFG method used to prepare silicon cores can be used as a technical reserve and research.