电子工业含磷酸废液资源化处理技术研究

Study on Resource Treatment Technology of Phosphoric Acid-Containing Waste Liquid in Electronics Industry

我国电子工业高速发展,作为其中关键化学品,电子级磷酸的需求增长显著。使用后,蚀刻等工序会产生较多的含磷酸废液。本文根据含磷酸废液的产生过程及特点,结合危险废物处理的行业经验,从提纯和制盐两大方向论述含磷酸废液的资源化处理技术,使危险废物处理企业在处理含磷酸废液时选择对自身最有利的资源化处理技术。

China’s electronics industry is developing rapidly,and as one of the key chemicals,the demand for electronic-grade phosphoric acid has grown significantly.After use,processes such as etching will generate a large amount of phosphoric acid-containing waste liquid.According to the production process and characteristics of phosphoric acid-containing waste liquid,combined with the industry experience of hazardous waste treatment,this paper discusses the resource treatment technology of phosphoric acid-containing waste liquid from the two directions of purification and salt production,so that hazardous waste treatment enterprises can choose the most beneficial resource treatment technology for themselves when dealing with phosphoric acid-containing waste liquid.